To provide an improved piezoelectric element with which a spurious response can be effectively suppressed and to obtain excellent vibration characteristics.
A piezoelectric element of the present invention includes a substrate 21, a lower electrode layer, a piezoelectric layer, an upper electrode layer 23, a cavity portion formed below a piezoelectric vibrating portion, and at least two bridging portions 2a, 2b. Two or more bridging portions 2a, 2b are formed so as not to be line-symmetric with respect to any line segment traversing the piezoelectric vibrating portion and/or so as not to be point-symmetric with respect to any point in the piezoelectric vibrating portion in a projection of the piezoelectric vibrating portion in the laminating direction.
COPYRIGHT: (C)2005,JPO&NCIPI
Hiroyuki Nakamura
Hiroshi Nakatsuka
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