Title:
成膜方法
Document Type and Number:
Japanese Patent JP4557558
Kind Code:
B2
Inventors:
Taizo Morinaka
Toshihiro Suzuki
Masahiro Matsumoto
Noriaki Tani
Toshihiro Suzuki
Masahiro Matsumoto
Noriaki Tani
Application Number:
JP2004014553A
Publication Date:
October 06, 2010
Filing Date:
January 22, 2004
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/34; C23C14/08; C23C14/10; C23C14/58
Domestic Patent References:
| JP10237630A | ||||
| JP2003027226A |
Attorney, Agent or Firm:
Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida
Shinichi Abe
Yuji Tsujida