Title:
真空ポンプ及びその制御方法
Document Type and Number:
Japanese Patent JP4558367
Kind Code:
B2
Inventors:
Toshiaki Kawashima
Namiki
Fukami Hideo
Namiki
Fukami Hideo
Application Number:
JP2004102907A
Publication Date:
October 06, 2010
Filing Date:
March 31, 2004
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; H02K7/09; H02P25/098; H02P29/00
Domestic Patent References:
| JP2215996A | ||||
| JP2001352786A | ||||
| JP2082000A | ||||
| JP2001508277A | ||||
| JP2003120582A | ||||
| JP2001119981A | ||||
| JP10184597A | ||||
| JP10288190A | ||||
| JP10327595A |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Village shrine Atsuo
Disciple Maru Ken
Ino Sato
Kiyoshi Oka
Toru Watanabe
Fumiaki Otsuka
Shishido Kaichi
Village shrine Atsuo
Disciple Maru Ken
Ino Sato
Kiyoshi Oka
Toru Watanabe