Title:
フッ素ガス放電レーザのための電極
Document Type and Number:
Japanese Patent JP4571941
Kind Code:
B2
Abstract:
Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.
Inventors:
Morton Richard G
Moose Man Bryan Gee
Dire Timothy S
Carmichael James A
Xan Zi Pin
Moose Man Bryan Gee
Dire Timothy S
Carmichael James A
Xan Zi Pin
Application Number:
JP2006521881A
Publication Date:
October 27, 2010
Filing Date:
July 16, 2004
Export Citation:
Assignee:
Cymer Incorporated
International Classes:
H01S3/038; H01S3/225; H01S3/036; H01S3/097; H01S3/0971; H01S
Foreign References:
| WO2003023910A1 | ||||
| WO2001097435A1 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda