Title:
部品の圧着装置及び圧着方法
Document Type and Number:
Japanese Patent JP4579670
Kind Code:
B2
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Inventors:
Tokazu Togashi
Application Number:
JP2004364745A
Publication Date:
November 10, 2010
Filing Date:
December 16, 2004
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
H01L21/60; G02F1/1345
Domestic Patent References:
JP2002057494A |
Attorney, Agent or Firm:
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto