Title:
θ-Y-Xステージ
Document Type and Number:
Japanese Patent JP4582448
Kind Code:
B2
Inventors:
Toyosaki Norio
Yasunori Ikeda
Eijiro Hirayanagi
Yasunori Ikeda
Eijiro Hirayanagi
Application Number:
JP2004349410A
Publication Date:
November 17, 2010
Filing Date:
December 02, 2004
Export Citation:
Assignee:
Hitachi Metals Co., Ltd.
neomax Engineering Co., Ltd.
neomax Engineering Co., Ltd.
International Classes:
H02K41/03; H02K41/02
Domestic Patent References:
| JP2002300766A | ||||
| JP2000511399A | ||||
| JP2000228840A | ||||
| JP57135645A |