真空成膜装置の搬送機構

Title:

真空成膜装置の搬送機構

Document Type and Number:

Japanese Patent JP4582450

Kind Code:

B2

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Inventors:

Odashima Tamotsu
Toshiyuki Koizumi
Minoru Yamane
Tsukigawa Keisumi

Application Number:

JP2005047734A

Publication Date:

November 17, 2010

Filing Date:

February 23, 2005

Export Citation:

Assignee:

ULVAC, Inc.

International Classes:

H01L21/677; B65G49/06; C23C14/56

Domestic Patent References:

Attorney, Agent or Firm:

Junichi Omori
Ori Akira
Yasuo Iisaka

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