Title:
圧電体薄膜とその製造方法、インクジェットヘッド、インクジェットヘッドを用いて画像を形成する方法、角速度センサ、角速度センサを用いて角速度を測定する方法、圧電発電素子ならびに圧電発電素子を用いた発電方法
Document Type and Number:
Japanese Patent JP4588807
Kind Code:
B1
Abstract:
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention comprises: a LaNiO3 film having a (001) orientation; a NaNbO3 film having a (001) orientation; and a (Bi, Na, Ba) TiO3 film having a (001) orientation. The LaNiO3 film, the NaNbO3 film, and the (Bi, Na, Ba)TiO3 film are laminated in this order.
Inventors:
Change
Hideaki Adachi
Eiji Fujii
Hideaki Adachi
Eiji Fujii
Application Number:
JP2010517213A
Publication Date:
December 01, 2010
Filing Date:
March 03, 2010
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L41/09; B41J2/045; B41J2/055; B41J2/135; B41J2/14; C23C14/06; H01L41/08; H01L41/113; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H01L41/319; H01L41/39
Domestic Patent References:
| JP2007266346A | 2007-10-11 | |||
| JP2007019302A | 2007-01-25 | |||
| JPS62202576A | 1987-09-07 | |||
| JPH10139552A | 1998-05-26 |
Attorney, Agent or Firm:
Koichi Kamata