Title:
金属膜作製方法及び金属膜作製装置
Document Type and Number:
Japanese Patent JP4589591
Kind Code:
B2
Inventors:
Hitoshi Sakamoto
Yoshiyuki Ohba
Toshihiko Nishimori
Naoki Yahata
Yoshiyuki Ohba
Toshihiko Nishimori
Naoki Yahata
Application Number:
JP2002027738A
Publication Date:
December 01, 2010
Filing Date:
February 05, 2002
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
H01L21/28; H01L21/285; H01L21/3205; H01L23/52
Domestic Patent References:
| JP9232313A | ||||
| JP2001118804A | ||||
| JP2001298028A |
Attorney, Agent or Firm:
Okabe
Masao Okabe
Nobuaki Kato
Shinichi Usui
Takao Ochi
Asahi Shinmitsu
Katsumi Miyama
Masao Okabe
Nobuaki Kato
Shinichi Usui
Takao Ochi
Asahi Shinmitsu
Katsumi Miyama