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Title:
バリア膜形成用材料及びそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP4594174
Kind Code:
B2
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Inventors:
Masataka Endo
Masako Sasako
Application Number:
JP2005174267A
Publication Date:
December 08, 2010
Filing Date:
June 14, 2005
Export Citation:
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Assignee:
Panasonic Corporation
International Classes:
G03F7/11; G03F7/039; G03F7/20; G03F7/38; H01L21/027
Domestic Patent References:
JP2005099648A
JP2006208434A
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Yoneda Keikei
Seki Kei
Yasuya Sugiura



 
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