Title:
基板載置台および基板処理装置
Document Type and Number:
Japanese Patent JP4597894
Kind Code:
B2
More Like This:
| JP2005303047 | SUBSTRATE CHUCK AND SHAPE MEASURING APPARATUS |
| JPS6473740 | JIG FOR ATTACHING PELLET |
| JPH10112495 | SUBSTRATE HOLDER |
Inventors:
Kenji Amano
Zenji Tanaka
Zenji Tanaka
Application Number:
JP2006096799A
Publication Date:
December 15, 2010
Filing Date:
March 31, 2006
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/683; C23C16/458; H01L21/3065
Domestic Patent References:
| JP2006049299A |
Attorney, Agent or Firm:
Hiroshi Takayama