位置決めマーカおよび位置決め装置

Title:

位置決めマーカおよび位置決め装置

Document Type and Number:

Japanese Patent JP4616509

Kind Code:

B2

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Inventors:

Tomohiro Ueda
Kondo Mutsumi
Goji Iwata
Kozo Fujimoto
Shuji Nakada

Application Number:

JP2001140859A

Publication Date:

January 19, 2011

Filing Date:

May 11, 2001

Export Citation:

Assignee:

Kozo Fujimoto
Panasonic Electric Works Co., Ltd.

International Classes:

G01N1/28; G01Q10/02; G01Q30/02; G01Q30/08; G01Q30/20; G01Q80/00

Domestic Patent References:

Attorney, Agent or Firm:

Keisei Nishikawa
Atsuo Mori
Keiichiro Saikyo
Takeshi Sugiyama

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