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Title:
リソグラフィ装置およびリソグラフィ装置のコンポーネントを制御する方法
Document Type and Number:
Japanese Patent JP4638454
Kind Code:
B2
Abstract:
A method of controlling a component within a lithographic apparatus is presented. The component is moved relative to a reference within the lithographic apparatus by a first actuator. A second actuator that exerts a force between the component and a reaction mass is used to adjust at least one of a position, velocity and acceleration of the component relative to the reference within the lithographic apparatus.

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Inventors:
Butler, hands
Application Number:
JP2007043039A
Publication Date:
February 23, 2011
Filing Date:
February 23, 2007
Export Citation:
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Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; H01L21/68
Domestic Patent References:
JP3125048A
JP2005183876A
JP2005079368A
JP11329962A
JP7325628A
JP11243132A
JP2003314610A
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki



 
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