Title:
高純度四フッ化ゲルマニウムを製造するための方法
Document Type and Number:
Japanese Patent JP4638662
Kind Code:
B2
Abstract:
A method of producing high purity germanium tetrafluoride comprising the step of flowing a mixture of inert gas and fluorine gas through a reactor chamber preferably containing germanium powder. The reactor effluent stream is conducted through at least one product trap effective for condensing and retaining at least a portion of the germanium tetrafluoride product. The product is preferably then purified by repeatedly subliming the product as necessary to remove volatile impurities.
Inventors:
Buhaghat Sadhia Solomon
Meshri Dayal Tea
Meshri Sanjay Dee
Bae tea Ma Iker Shane
Meshri Dayal Tea
Meshri Sanjay Dee
Bae tea Ma Iker Shane
Application Number:
JP2003293495A
Publication Date:
February 23, 2011
Filing Date:
August 14, 2003
Export Citation:
Assignee:
Advanced Research Chemicals, Inc.
International Classes:
C01G17/04
Domestic Patent References:
| JP6234523A | ||||
| JP2000072438A | ||||
| JP2002029707A | ||||
| JP2001295086A | ||||
| JP1234301A |
Other References:
化学大辞典編集委員会,化学大辞典7,共立出版株式会社,1979年11月10日,第861頁
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shurin Sakurai
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shurin Sakurai