Title:
被加工物の分割処理方法および分割処理方法に用いるチップ間隔拡張装置
Document Type and Number:
Japanese Patent JP4647830
Kind Code:
B2
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Inventors:
Satoshi Tateiwa
Application Number:
JP2001140581A
Publication Date:
March 09, 2011
Filing Date:
May 10, 2001
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; H01L21/683; H01L21/68
Domestic Patent References:
| JP2000349138A | ||||
| JP58046859B2 | ||||
| JP7321070A | ||||
| JP11003875A | ||||
| JP10284446A | ||||
| JP50079256A | ||||
| JP8316177A | ||||
| JP9286884A | ||||
| JP7122583A | ||||
| JP2000068235A | ||||
| JP2001110757A |
Attorney, Agent or Firm:
Naozumi Ono