Title:
画像形成用露光装置と、その画像ずれ補正方法
Document Type and Number:
Japanese Patent JP4651938
Kind Code:
B2
Inventors:
Akihiro Hashiguchi
Application Number:
JP2003429124A
Publication Date:
March 16, 2011
Filing Date:
December 25, 2003
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/20; H01L21/027
Domestic Patent References:
| JP2003345030A | ||||
| JP2002351086A | ||||
| JP2005509893A | ||||
| JP2003122030A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda