Title:
半導体基板洗浄液
Document Type and Number:
Japanese Patent JP4661206
Kind Code:
B2
Inventors:
Fumiharu Takahashi
Yasushi Hara
Hiroaki Hayashi
Yasushi Hara
Hiroaki Hayashi
Application Number:
JP2004365941A
Publication Date:
March 30, 2011
Filing Date:
December 17, 2004
Export Citation:
Assignee:
Tosoh Corporation
International Classes:
H01L21/304; C11D7/18; C11D7/32; C11D17/08
Domestic Patent References:
| JP2001240985A | ||||
| JP3182765B2 |