Title:
水晶振動子の露光用マスク
Document Type and Number:
Japanese Patent JP4667797
Kind Code:
B2
Inventors:
Masahiko Goto
Application Number:
JP2004253654A
Publication Date:
April 13, 2011
Filing Date:
August 31, 2004
Export Citation:
Assignee:
Kyocera Kinseki Co., Ltd.
International Classes:
H03H3/02; G03F1/42
Domestic Patent References:
| JP2002261557A | ||||
| JP2001033941A | ||||
| JP2000231185A | ||||
| JP2000171966A | ||||
| JP61046021A | ||||
| JP4011404A | ||||
| JP10270967A |