Title:
真空ポンプの接続構造及び真空ポンプ
Document Type and Number:
Japanese Patent JP4672204
Kind Code:
B2
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Inventors:
Namiki
Application Number:
JP2001236100A
Publication Date:
April 20, 2011
Filing Date:
August 03, 2001
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04B37/16; F04D27/00; F04D19/04; F04D29/00; F04D29/42; F04D29/44; F04D29/66
Domestic Patent References:
| JP63501519A | ||||
| JP56038598A | ||||
| JP2000073986A | ||||
| JP59221482A | ||||
| JP61008479A | ||||
| JP58120554U | ||||
| JP2000117093A | ||||
| JP5248387A | ||||
| JP2112681A | ||||
| JP11257277A | ||||
| JP11303791A |
Attorney, Agent or Firm:
Masatoshi Shiina