Title:
クリーンルームの加湿方法及びクリーンルーム装置
Document Type and Number:
Japanese Patent JP4672844
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a means for cleanly humidifying a clean room with suppressing the operating expense and the equipment cost low. SOLUTION: A centrifugal humidifier 35 discharges water mist into a stream of air flowing in a passage 16 to a supply chamber 14 from a return chamber 15 of a clean room 11, thereby evaporating the water to humidify. The water feed rate to a rotary board 40 and the number of revolution of the rotary board 40 are controlled so that the feed rate and the number of revolution are increased or decreased to increase or decrease the humidifying rate, respectively.
More Like This:
| WO/2023/115643 | SWIMMING POOL TEMPERATURE ADJUSTING APPARATUS |
Inventors:
Shuichi Ishii
Masanori Inoue
Hiroshi Gomi
Masanori Inoue
Hiroshi Gomi
Application Number:
JP2000290234A
Publication Date:
April 20, 2011
Filing Date:
September 25, 2000
Export Citation:
Assignee:
Takasago Thermal Engineering Co., Ltd.
International Classes:
F24F3/14; F24F6/16; F24F6/00; F24F7/06
Domestic Patent References:
| JP8082432A | ||||
| JP2230041A | ||||
| JP56140032U | ||||
| JP7332733A |
Attorney, Agent or Firm:
Koji Hagiwara
Tetsuo Kanamoto
Miaki Kametani
Kenji Wada
Tetsuo Kanamoto
Miaki Kametani
Kenji Wada