Title:
プラズマエッチングにおけるチャンバークリーニング方法
Document Type and Number:
Japanese Patent JP4673025
Kind Code:
B2
Inventors:
Hidetake Ogata
Hiroyuki Shima
Inaba
Hiroyuki Shima
Inaba
Application Number:
JP2004265058A
Publication Date:
April 20, 2011
Filing Date:
September 13, 2004
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01L21/3065
Domestic Patent References:
| JP2000100799A | ||||
| JP8111420A | ||||
| JP2004039789A | ||||
| JP2001093877A | ||||
| JP10233388A | ||||
| JP2002190468A |
Attorney, Agent or Firm:
Patent Business Corporation Daiichi International Patent Office