Title:
炭素膜積層体及びその製造方法
Document Type and Number:
Japanese Patent JP4675883
Kind Code:
B2
Abstract:
A carbon film laminate 1 having a porous substrate 6 formed of a plurality of particles and a carbon film 2 provided on a surface of the porous substrate 6, wherein the porous substrate 6 includes a surface layer 3 which is in contact with the carbon film 2 and which is formed of particles 3a having a mean particle size of 0.01 to 0.11 µm, and a porous body 5 formed of particles having a mean particle size differing from that of the particles 3a forming the surface layer 3. The invention provides a carbon film laminate which does not generate cracks and pinholes of the carbon film and which is suitable for producing thin film thereof.
Inventors:
Kazuyuki Umikawa
Toshihiro Tomita
Manabu Yoshida
Masamichi Obata
Toshihiro Tomita
Manabu Yoshida
Masamichi Obata
Application Number:
JP2006511071A
Publication Date:
April 27, 2011
Filing Date:
March 11, 2005
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
B01D71/02; B01D53/02; B01D53/22; B01D67/00; B01D69/10; B01D69/12; B01J20/20; C01B13/02; C01B31/02; B01J20/28
Domestic Patent References:
| JP6198148A | ||||
| JP2043928A | ||||
| JP2002537991A |
Attorney, Agent or Firm:
Ippei Watanabe