Title:
基板検査装置及び基板検査方法
Document Type and Number:
Japanese Patent JP4679282
Kind Code:
B2
Inventors:
Susumu Iwai
Noboru Kato
Noboru Kato
Application Number:
JP2005209218A
Publication Date:
April 27, 2011
Filing Date:
July 19, 2005
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01N21/958
Domestic Patent References:
| JP2005098970A | ||||
| JP4029041A | ||||
| JP9257642A |
Attorney, Agent or Firm:
Kozo Takahashi