Title:
カルコパイライト型薄膜太陽電池の製造方法
Document Type and Number:
Japanese Patent JP4680183
Kind Code:
B2
Abstract:
There is provided a method for fabricating a chalcopyrite-type thin-film solar cell, which has good adhesion between the electrode layer and the light absorbing layer which consists of a chalcopyrite-type compound, and which has a stable layered structure and does not have any problems with its external appearance even when the concentration of an alkali-metal solution for forming an alkali layer is comparatively high. The method according to the present invention comprises a first step of forming onto a Mo electrode layer 2 a precursor comprised of an In metal layer and a Cu-Ga alloy layer by sputtering, a second step of attaching an alkali-metal solution onto the precursor, a selenization step of subjecting the substrate 1 which has undergone both the first and the second steps to a selenization treatment, and a transparent electrode forming step of depositing an optically transparent conductive layer. As the alkali-metal solution, an aqueous solution of an alkali metal compound, such as sodium tetraborate, sodium sulfide, and sodium aluminum sulfate, can be used.
Inventors:
Seishi Aoki
Application Number:
JP2006512934A
Publication Date:
May 11, 2011
Filing Date:
April 12, 2005
Export Citation:
Assignee:
Honda motor industry stock company
International Classes:
H01L31/04; H01L31/032
Domestic Patent References:
| JP2001044464A | 2001-02-16 | |||
| JPH08102546A | 1996-04-16 | |||
| JPH08222750A | 1996-08-30 | |||
| JP2003282908A | 2003-10-03 | |||
| JP2003258282A | 2003-09-12 | |||
| JPH0563225A | 1993-03-12 |
Foreign References:
| WO2003069684A1 | 2003-08-21 |
Attorney, Agent or Firm:
Yu Koyama