Title:
圧電デバイスとその製造方法
Document Type and Number:
Japanese Patent JP4680449
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To process a piezoelectric device in the expected shape with proper reproducibility, by forming a recess side face disposed between the main surface of a thin plate and a main surface of a frame substantially similarly to obtain stable electrical characteristics and a reproducible deformation predicted at a thin plate in an effective means, capable of processing wet etching to be rapidly processed at a crystal in a large quantity, when a partial thickness of a crystal piece is thinned to process a recessed shape in section to obtain a high resonance frequency or utilized for a sensor or the like. SOLUTION: A method for manufacturing the piezoelectric device comprises the steps of opening a window in a triangular shape on the main surface of a crystal plate to form a protective film, then melting the window part through wet etching, thinning the window part to process into recessed shape, and processing so that a thin plate is in the triangular shape as seen from the main surface.
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Inventors:
Akihisa Kosaka
Application Number:
JP2001271131A
Publication Date:
May 11, 2011
Filing Date:
September 07, 2001
Export Citation:
Assignee:
Citizen Holdings Co., Ltd.
International Classes:
H01L41/09; H03H9/19; H01L41/18; H01L41/22; H01L41/311; H01L41/332; H03H3/02
Domestic Patent References:
| JP9055635A | ||||
| JP8242134A | ||||
| JP3235409A |
Attorney, Agent or Firm:
Akira Miyajima
Shigeru Tsuchiya
Shigeru Tsuchiya