Title:
無電解銅めっき液およびそれを使用する無電解銅めっき方法
Document Type and Number:
Japanese Patent JP4680493
Kind Code:
B2
Inventors:
Yoshiyuki Hikano
Atsushi Yabe
Junnosuke Sekiguchi
Toru Imori
Atsushi Yabe
Junnosuke Sekiguchi
Toru Imori
Application Number:
JP2003396535A
Publication Date:
May 11, 2011
Filing Date:
November 27, 2003
Export Citation:
Assignee:
jx Nippon Mining & Metals Co., Ltd.
International Classes:
C23C18/38; H01L21/288
Domestic Patent References:
| JP428877A |
Attorney, Agent or Firm:
Masami Sakai
Norio Kagami
Norio Kagami