Title:
過フッ素化多官能性アニオンを有する光酸発生剤
Document Type and Number:
Japanese Patent JP4680915
Kind Code:
B2
Abstract:
Photoacid generators (PAGs) comprising photoactive moieties and perfluorinated, multifunctional anionic moieties (or incipient anionic moieties) are disclosed which provide photoacids with high acid strength, low volatility and low diffusivity. The present invention further relates to photoacid generators as they are used in photoinitiated or acid-catalyzed processes for uses such as photoresists for microlithography and photopolymerization.
Inventors:
Ramanna, William M.
Application Number:
JP2006532863A
Publication Date:
May 11, 2011
Filing Date:
May 07, 2004
Export Citation:
Assignee:
3M INNOVATIVE PROPERTIES COMPANY
International Classes:
C09K3/00; C07C309/06; C07C309/17; C07C309/19; C07C381/12; C07D241/04; G03C1/76; G03F7/00; G03F7/004; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
| JP2002006480A | ||||
| JP2002196482A | ||||
| JP9183961A | ||||
| JP2001255647A | ||||
| JP2001133984A | ||||
| JP2004519520A | ||||
| JP2002128758A | ||||
| JP2002128755A | ||||
| JP57074394A | ||||
| JP2002148821A |
Foreign References:
| US4302346 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Kenichi Kato
Masaya Nishiyama
Takashi Ishida
Tetsuji Koga
Kenichi Kato
Masaya Nishiyama