Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4686867
Kind Code:
B2
Inventors:
Tatsuo Hatano
Kenji Narishima
Kenji Narishima
Application Number:
JP2001044255A
Publication Date:
May 25, 2011
Filing Date:
February 20, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/509; H05H1/46; B01J19/08; H01L21/205; H01L21/302; H01L21/3065
Domestic Patent References:
| JP7106316A | ||||
| JP3179735A | ||||
| JP2000311859A |
Attorney, Agent or Firm:
Akihiro Asai