Title:
半導体製造装置用耐プラズマ性部材
Document Type and Number:
Japanese Patent JP4688307
Kind Code:
B2
Inventors:
Akira Miyazaki
Mitsuhiro Fujita
Shunzo Shimai
Keiji Morita
Shunichi Suzuki
Shuichi Saito
Aoki Katsuaki
Eriko Nishimura
Mitsuhiro Fujita
Shunzo Shimai
Keiji Morita
Shunichi Suzuki
Shuichi Saito
Aoki Katsuaki
Eriko Nishimura
Application Number:
JP2001036819A
Publication Date:
May 25, 2011
Filing Date:
February 14, 2001
Export Citation:
Assignee:
Covalent Materials Co., Ltd.
Toshiba Corporation
Toshiba Corporation
International Classes:
C04B35/44; C23C14/34; C23C16/44
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Attorney, Agent or Firm:
Mitsuyuki Matsuyama