Title:
感光性ポリアミド酸エステル組成物
Document Type and Number:
Japanese Patent JP4693685
Kind Code:
B2
Inventors:
Tamura Nobufumi
Kimiyuki Maruyama
Kimiyuki Maruyama
Application Number:
JP2006110584A
Publication Date:
June 01, 2011
Filing Date:
April 13, 2006
Export Citation:
Assignee:
Asahi Kasei E-materials Co., Ltd.
International Classes:
G03F7/027
Domestic Patent References:
| JP2004077553A | ||||
| JP11024257A | ||||
| JP2005099353A | ||||
| JP2004091572A | ||||
| JP43439A1 | ||||
| JP2001264975A |
Attorney, Agent or Firm:
Hideo Takei
Yoshio Narui
Yoshiaki Matsui
Yoshio Narui
Yoshiaki Matsui