Title:
シリコン単結晶引上げ用石英ガラスルツボの製造方法
Document Type and Number:
Japanese Patent JP4702898
Kind Code:
B2
Inventors:
Yasuo Ohama
Takayuki Tokawa
Takayuki Tokawa
Application Number:
JP2007241002A
Publication Date:
June 15, 2011
Filing Date:
September 18, 2007
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
C30B29/06; C03B20/00; C30B15/10
Domestic Patent References:
| JP2001261353A | ||||
| JP5124889A | ||||
| JP8239231A | ||||
| JP6127971A | ||||
| JP6166522A | ||||
| JP8040736A | ||||
| JP8048532A | ||||
| JP9235134A | ||||
| JP2000044386A | ||||
| JP2000154029A | ||||
| JP2001348240A |
Attorney, Agent or Firm:
Heihachi Hattori