Title:
エッチング方法
Document Type and Number:
Japanese Patent JP4704364
Kind Code:
B2
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Inventors:
Satoru Ikeda
Hideo Takei
Hideo Takei
Application Number:
JP2007004485A
Publication Date:
June 15, 2011
Filing Date:
January 12, 2007
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L21/3065
Domestic Patent References:
| JP2003151955A | ||||
| JP2000331985A | ||||
| JP4122047A | ||||
| JP2002319571A | ||||
| JP2001093878A | ||||
| JP2006237182A | ||||
| JP11186243A | ||||
| JP8124905A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe