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Title:
フッ化物単結晶及びフッ化カルシウム単結晶の選別方法
Document Type and Number:
Japanese Patent JP4706354
Kind Code:
B2
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Inventors:
Keiji Sumitani
Natimus Sengtvan
Hiroyuki Ishibashi
Masahiro Aoshima
Application Number:
JP2005188560A
Publication Date:
June 22, 2011
Filing Date:
June 28, 2005
Export Citation:
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Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
C30B29/12; C30B33/00; G01M11/00; G01N17/00; G01N21/33; H01L21/027
Domestic Patent References:
JP2003002789A
JP7281001A
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Ryugo Akahori



 
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