Title:
ハロゲンガスの除去方法
Document Type and Number:
Japanese Patent JP4711550
Kind Code:
B2
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Inventors:
Mori Kaichi
Hachiro Hirano
Kawabe Yoshikatsu
Hachiro Hirano
Kawabe Yoshikatsu
Application Number:
JP2001202977A
Publication Date:
June 29, 2011
Filing Date:
July 04, 2001
Export Citation:
Assignee:
Sanwa Chemical Co., Ltd.
Asahi Glass Co., Ltd.
Asahi Glass Co., Ltd.
International Classes:
B01D53/68; B01D53/34; B01J20/04; B01J20/28; H01L21/302; H01L21/3065
Domestic Patent References:
| JP10235147A | ||||
| JP5237324A | ||||
| JP2000107552A | ||||
| JP11290641A | ||||
| JP11183055A | ||||
| JP58067323A | ||||
| JP11514962A | ||||
| JP2000354735A | ||||
| JP2000102721A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Noriko Yanai
Mamoru Tsunoda
Masatake Shiga
Suzuki Mitsuyoshi
Noriko Yanai
Mamoru Tsunoda