Title:
耐食性ガラス部材およびその製造方法並びにそれを用いた装置
Document Type and Number:
Japanese Patent JP4732712
Kind Code:
B2
Inventors:
Hajime Arai
Tsutomu Takahata
Hashimoto Shinkichi
Tsutomu Takahata
Hashimoto Shinkichi
Application Number:
JP2004157738A
Publication Date:
July 27, 2011
Filing Date:
May 27, 2004
Export Citation:
Assignee:
Tosoh Corporation
Toso-ES-M Co., Ltd.
Toso-ES-M Co., Ltd.
International Classes:
C03C4/20; C03C23/00; C03C3/06; C03C21/00; H01L21/205
Domestic Patent References:
| JP11228172A | ||||
| JP2002356346A | ||||
| JP2002220251A | ||||
| JP3193637A | ||||
| JP2002193634A |