Title:
搬送装置及びその制御方法並びに真空処理装置
Document Type and Number:
Japanese Patent JP4732716
Kind Code:
B2
Abstract:
A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.
Inventors:
South Exhibition History
Kenji Ago
Takafumi Kawaguchi
Toshio Koike
Junpei Yuyama
Kenji Ago
Takafumi Kawaguchi
Toshio Koike
Junpei Yuyama
Application Number:
JP2004191946A
Publication Date:
July 27, 2011
Filing Date:
June 29, 2004
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L21/677; B25J9/06; B25J9/10; B25J17/00; B65G49/07
Domestic Patent References:
| JP3204115B2 | ||||
| JP11198070A | ||||
| JP2004146714A | ||||
| JP2000042952A | ||||
| JP2001118905A |
Attorney, Agent or Firm:
Hideki Abe
Shigeo Ishijima
Shigeo Ishijima