Title:
検査プローブ
Document Type and Number:
Japanese Patent JP4741949
Kind Code:
B2
Abstract:
A conventional inspection probe has posed such problems that, when a pitch is as fine as up to 40 mum, a positional accuracy is difficult to ensure depending on constituting materials and a production method, pin breaking occurs when fine-diameter pins contact, a good contact cannot be obtained due to an insufficient contact, an durability is insufficient. An inspection probe having a probe structure comprising an elastic probe pin, a wiring layer carrying substrate, a backup plate to install a substrate thereon, an inspection substrate and a flexible substrate, characterized in that a good-contact material layer according to the electrode material of a semiconductor device is formed at the tip end of a probe pin and a wiring layer has a structure formed of a low-resistance metal layer, with the good-contact material layer being separated from the low-resistance metal layer. Such a structure can provide very high contact reliability and mechanical durability at a pitch as very fine as up to 40 mum.
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Inventors:
Tanioka Michiharu
Atsuo Hattori
Atsuo Hattori
Application Number:
JP2005505434A
Publication Date:
August 10, 2011
Filing Date:
April 15, 2004
Export Citation:
Assignee:
NEC
Yamaichi Electric Co., Ltd.
Yamaichi Electric Co., Ltd.
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| JP2002277485A | 2002-09-25 | |||
| JPH1038918A | 1998-02-13 | |||
| JPH09119945A | 1997-05-06 | |||
| JPH05114666A | 1993-05-07 |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Takashi Sasaki
Shuichi Fukuda
Takashi Sasaki