Title:
ジルコニウムの均一な分散性を有する石英ガラス、その製造方法、これを用いた部材及び装置
Document Type and Number:
Japanese Patent JP4744003
Kind Code:
B2
Inventors:
Hashimoto Shinkichi
Shuzo Mizutani
Shuzo Mizutani
Application Number:
JP2001166312A
Publication Date:
August 10, 2011
Filing Date:
June 01, 2001
Export Citation:
Assignee:
Tosoh Corporation
Tosoh Quartz Co., Ltd.
Toso-ES-M Co., Ltd.
Tosoh Quartz Co., Ltd.
Toso-ES-M Co., Ltd.
International Classes:
C03B20/00; C03C3/06; C03C10/14; H01L21/302; H01L21/3065
Domestic Patent References:
| JP2002356346A | ||||
| JP2002193634A | ||||
| JP2002137927A | ||||
| JP2002356340A | ||||
| JP3008744A | ||||
| JP6034135A | ||||
| JP11302026A | ||||
| JP11278858A | ||||
| JP8165131A |