Title:
シート貼付装置及び貼付方法
Document Type and Number:
Japanese Patent JP4746017
Kind Code:
B2
Inventors:
Masahisa Otsuka
Application Number:
JP2007194228A
Publication Date:
August 10, 2011
Filing Date:
July 26, 2007
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/683
Domestic Patent References:
| JP2004349435A | ||||
| JP2045579A | ||||
| JP2006108127A | ||||
| JP2004281867A |
Attorney, Agent or Firm:
Yoshio Yamaguchi