Title:
感光性樹脂組成物、ならびにこれを用いた段差パターンの製造方法及びインクジェットヘッドの製造方法
Document Type and Number:
Japanese Patent JP4761498
Kind Code:
B2
Abstract:
To provide a positive type photosensitive resin composition, containing at least an acrylic resin having a carboxylic anhydride structure in a molecule, and a compound that generates an acid when irradiated with light.
Inventors:
Shoji Shiba
Hiroe Ishikura
Akihiko Okano
Hiroe Ishikura
Akihiko Okano
Application Number:
JP2004190479A
Publication Date:
August 31, 2011
Filing Date:
June 28, 2004
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/039; B41J2/16; G03F7/26; G03F7/32
Domestic Patent References:
| JP2004046217A | ||||
| JP2004042650A | ||||
| JP2003057819A | ||||
| JP10077314A | ||||
| JP57124341A | ||||
| JP2003327631A | ||||
| JP11212265A |
Attorney, Agent or Firm:
Akio Miyazaki
Katsuhiro Ito
Ishibashi Masayuki
Katsuhiro Ito
Ishibashi Masayuki