Title:
原子層成長法
Document Type and Number:
Japanese Patent JP4769638
Kind Code:
B2
Inventors:
Annerise Delaby
Matty Kaimax
Matty Kaimax
Application Number:
JP2006153273A
Publication Date:
September 07, 2011
Filing Date:
June 01, 2006
Export Citation:
Assignee:
IMEC
International Classes:
H01L21/316; C23C16/455; H01L21/31
Domestic Patent References:
| JP5102189A | ||||
| JP2003105542A | ||||
| JP2006024668A | ||||
| JP2001039795A | ||||
| JP6069195A | ||||
| JP8125188A | ||||
| JP2260522A | ||||
| JP2000150511A | ||||
| JP2005086023A | ||||
| JP2005064052A |
Foreign References:
| WO2003015205A1 |
Attorney, Agent or Firm:
Takuji Yamada
Haruo Nakano
Haruo Nakano