Title:
スペーサの製造方法
Document Type and Number:
Japanese Patent JP4773812
Kind Code:
B2
Inventors:
Taro Hiroike
Yoichi Ando
Yoichi Ando
Application Number:
JP2005351638A
Publication Date:
September 14, 2011
Filing Date:
December 06, 2005
Export Citation:
Assignee:
Canon Inc
International Classes:
H01J9/24; H01J29/87; H01J31/12
Domestic Patent References:
| JP2000311633A | ||||
| JP8180821A | ||||
| JP2002321306A | ||||
| JP2000243330A | ||||
| JP2000082426A | ||||
| JP2000251707A |
Attorney, Agent or Firm:
Keisuke Watanabe
Yoshihiro Yamaguchi
Yoshihiro Yamaguchi