Title:
基板ホルダ及びステージ装置並びに露光装置
Document Type and Number:
Japanese Patent JP4779973
Kind Code:
B2
Abstract:
An object of the invention is to hold a substrate with satisfactory flatness, even at a circumferential edge part that surrounds a suction space. The invention is equipped with a circumferential edge part (33) that surrounds a suction space (38), and a first support part (34) that is provided in the suction space (38) and that supports a substrate. Furthermore, the invention is equipped with a second support part (7) that extends from the circumferential edge part (33) to the first support part (34) and that supports the substrate.
Inventors:
Yuichi Shibasaki
Application Number:
JP2006532686A
Publication Date:
September 28, 2011
Filing Date:
August 29, 2005
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2002246450A | 2002-08-30 | |||
| JP2001244177A | 2001-09-07 | |||
| JPH10233433A | 1998-09-02 | |||
| JPH08102437A | 1996-04-16 | |||
| JPH11317440A | 1999-11-16 | |||
| JPH04280619A | 1992-10-06 | |||
| JPS63141313A | 1988-06-13 | |||
| JPH04152512A | 1992-05-26 |
Attorney, Agent or Firm:
Masatake Shiga