Title:
ロードロック装置、それを備えた基板処理装置および基板処理システム
Document Type and Number:
Japanese Patent JP4781192
Kind Code:
B2
Inventors:
Masahiko Harumoto
Application Number:
JP2006208764A
Publication Date:
September 28, 2011
Filing Date:
July 31, 2006
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/027; H01L21/677
Domestic Patent References:
| JP6300436A | ||||
| JP2004200329A | ||||
| JP2005050955A | ||||
| JP2006501632A | ||||
| JP2001002241A | ||||
| JP2001001290A |
Attorney, Agent or Firm:
Yoshito Fukushima