Title:
超音波振動接合装置及び超音波振動接合方法
Document Type and Number:
Japanese Patent JP4787603
Kind Code:
B2
Inventors:
Keiichiro Hayashi
Application Number:
JP2005333695A
Publication Date:
October 05, 2011
Filing Date:
November 18, 2005
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
H01L21/607; B23K20/10; B23K101/36
Domestic Patent References:
| JP2002100653A | ||||
| JP4369848A | ||||
| JP2004047692A | ||||
| JP10022342A | ||||
| JP2006013074A | ||||
| JP2006005183A | ||||
| JP2691201B2 | ||||
| JP2654762B2 |
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
Noriaki Uchino
Nobuyuki Kimura