Title:
金属珪素の精製方法
Document Type and Number:
Japanese Patent JP4788925
Kind Code:
B2
Inventors:
Yamada
Application Number:
JP2007289266A
Publication Date:
October 05, 2011
Filing Date:
November 07, 2007
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C01B33/037
Domestic Patent References:
| JP10182134A | ||||
| JP7309614A | ||||
| JP4193706A | ||||
| JP2003277040A | ||||
| JP2001526171A |
Foreign References:
| WO2007112592A1 |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa