Title:
炭化珪素半導体材料の製造方法
Document Type and Number:
Japanese Patent JP4797571
Kind Code:
B2
Inventors:
Akinori Seki
Application Number:
JP2005311596A
Publication Date:
October 19, 2011
Filing Date:
October 26, 2005
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
H01L21/205
Domestic Patent References:
| JP11121748A | ||||
| JP5109625A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda