To prevent generation of noise due to damage of an optical detection unit in mounting of a radiation detector.
The radiation detector 40 includes: a photodiode array; and a scintillator panel 31. The photodiode array includes the semiconductor substrate 3 in which a plurality of photodiodes 4 are arranged in an array on an incident side of light to be detected. The semiconductor substrate 3 includes pierced wiring 8 for piercing the incident side and the back side as to photodiodes, so as to be coated at the incident side of the simiconductor 3 in an area where at least the photodiodes 4 are arranged, including a transparent resin film 6, made of a resin transmitting the light to be detected, having a function as a cushion layer protecting the area where the photodiodes are arranged, wherein the transparent resin film 6 has the scintillator panel 31 formed on a flat surface of a side where the scintillator panel 31 is attached through an optical resin 35 which transmits light from the scintillator panel.
COPYRIGHT: (C)2009,JPO&INPIT
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Shiro Terasaki
Satoru Ishida
Hiroto Kido