Title:
液処理装置及び処理液の消泡方法
Document Type and Number:
Japanese Patent JP4813393
Kind Code:
B2
Inventors:
Teruomi Minami
Maki Taira
Shigenori Kitahara
Maki Taira
Shigenori Kitahara
Application Number:
JP2007032348A
Publication Date:
November 09, 2011
Filing Date:
February 13, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304
Domestic Patent References:
| JP8017787A | ||||
| JP2000288307A |
Attorney, Agent or Firm:
Mihiro Uchino