成膜装置および成膜方法 - 東京エレクトロン株式会社

Title:

成膜装置および成膜方法

Document Type and Number:

Japanese Patent JP4817210

Kind Code:

B2

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Inventors:

Kimihiro Matsuse
Otsuki forest

Application Number:

JP2001000183A

Publication Date:

November 16, 2011

Filing Date:

January 04, 2001

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

C23C16/455; C23C16/46; C23C16/34; C23C16/44; H01L21/28; H01L21/285; H01L21/31

Domestic Patent References:

Attorney, Agent or Firm:

Hiroshi Takayama

Previous Patent: JPS4817209

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